No Room for Mistakes
Some jobs need more than just a working pump. The semiconductor industry is one of them. A tiny bit of oil can ruin a whole batch of wafers. That is why we offer dry screw semiconductor vacuum pumps. These pumps have no oil in the pump chamber. The gas path is short. This means fewer particles stay inside. You get clean and stable vacuum.
Reliable Models for Clean Work
Our product include the IDP850. It gives 850 m³/h. The IDS1100 gives 1030 m³/h with 18.5 kW. The IDP1100 also gives 1030 m³/h but with 22 kW. All three keep your process clean. Many customers choose these semiconductor vacuum pumps because they do not fail. Downtime in a chip plant costs a lot of money. So we take this very seriously.
Fast Response Keeps You Running
We build a stock of common parts. When you need a replacement, we ship it fast. Agents can tell customers that stable running and fast response are the key benefits. With our semiconductor vacuum pumps, you get both. We answer your call quickly. We help you fix the problem. That is how we keep your line moving.
|
Name |
Model |
Maximum pumping speed (m³/h) |
Rated power (kW) |
Maximum speed (rpm) |
External dimensions (mm) |
|
Dry screw vacuum pump |
IDP850 |
850 |
18.5 |
3300 |
1907*868*787 |
|
IDS1100 |
1030 |
18.5 |
3600 |
1700*650*750 |
|
|
IDP1100 |
1030 |
twenty two |
3600 |
1907*868*787 |
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